New clean room

A new laboratory

Professor Ricardo Izquierdo from the Department of Computer Science at UQAM and the NanoQAM research center have just made a completely new clean room available to various academic and industrial players in the fields of nanotechnologies and microelectronics.

Clean room properties

This clean room has as research equipment two mask aligners (optical lithography) and an evaporator by joules effect (deposit of thin layers of metals and organic materials). Also present in this room are the equipment necessary for the preparation and characterization of advanced materials and systems, namely: a microscope (500x) equipped with a digital camera, a microwave plasma system (oxygen, argon), a deposition system by spin coating and a 4-point system for measuring the resistivity of thin layers.

Future uses

The clean room also includes a materials printer (fluid lithography) currently in the process of developing and optimizing processes, which will in turn be accessible to external users in the coming months. Anyone interested in the autonomous use of this equipment or who wishes to have access to the clean room must imperatively undergo training beforehand with Ms. Marianne Crépel.