New equipment for nanofabrication

Nanofabrication

Professor Fréréric Nabki from the Department of Computer Science at UQAM, the CoFaMic research center and the NanoQAM research center have just made 3 new scientific equipment available to the various academic and industrial players in the fields of nanotechnologies and microelectronics.

Profilometer

This profilometer allows to characterize the topography of a surface with a lateral resolution of 1nm. This instrument also allows stress measurement and 3D mapping. Direct applications of this type of instrument are: thickness measurement of thin layers, stress measurement, roughness measurement, and 3D representation of surfaces.

Parylene deposition system

The parylene deposition system, SCS Labcoter 2, allows reliable, uniform (95%) and reproducible deposition of parylenes (types C or N). The thicknesses of the layers obtained can be between a few nm to several µm. This instrument allows to operate at temperatures from 20 ° C to 650 ° C and pressures from 1 to 100 torr. The applications of this instrument are the synthesis of components for printed circuits (PCB), sensors, wafers or medical devices, MEMS and elastomer components for R&D.

Plasma cleaning system

This instrument makes it possible to perform plasma cleanings in order to remove impurities and contaminants from surfaces through the use of an energetic plasma created from gaseous species (N2 / Ar).

Future uses

Anyone interested in using this material printer must first undergo training with Mr. Gwenaël Chamoulaud.