Model: Laurell, Spin Coater
Room: Clean room, CB-3916

• WS-400 Lite Series Spin Processor Operation Manual
• WS-650 Modular Spin Processor Operation Manual

• Kayaku Advanced Materials

• S1800 series (positive photoresists)
• Microposit MF-319 (developer for S1800 series photoresists)
• SU-8 series (negative photoresists)
• MicroChem SU-8 developer (developer for SU-8 series photoresists)